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发明名称
PHOTORESISTS, POLYMERE UND VERFAHREN FÜR DIE MIKROLITHOGRAPHIE
摘要
申请公布号
DE69926532(D1)
申请公布日期
2005.09.08
申请号
DE1999626532
申请日期
1999.09.21
申请人
E.I. DU PONT DE NEMOURS AND CO., WILMINGTON
发明人
FEIRING, EDWARD;FELDMAN, JERALD
分类号
C08F14/18;C08F114/18;C08F214/18;C08F216/14;C08F218/04;C08F232/08;C08K5/00;C08L27/12;G03C1/73;G03F7/004;G03F7/038;G03F7/039;G03F7/20;G03F7/30;G03F7/32;H01L21/027;(IPC1-7):G03F7/039;C08F232/00;C08F220/18
主分类号
C08F14/18
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代理人
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