MASS ANALYZER ON WAFER SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a structure based on a wafer substrate, regarding a mass analyzer.

SOLUTION: The apparatus comprises the wafer substrate of a semiconductor or a dielectric and first and second multi-layer structures arranged on the wafer substrate. The first multi-layer structure has an ionizer or an electronic type ion detector. The second multi-layer structure has an ion trap having inlet and outlet ports. The ionizer or the electronic type ion detector has a port connected to either of the ports of the ion trap.

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