PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent the narrowing of a space between the intermediate parts in the longitudinal direction of a pair of long electrodes of a plasma treatment apparatus due to Coulomb force or the like.

SOLUTION: The plasma treatment apparatus has a pair of parallel long sections 21 comprising the long electrodes 30. The space between one end and one end in the longitudinal direction of the long sections and the space between the other end and the other end are sealed with gas passageway side demarcation members 26 respectively. A small stick-shaped spacer 70 is installed in the gas passageway 21a between the long sections located between the two long sections 21 and 21 and in the middle of the gas passageway side demarcation members 26 and 26 at both ends.

COPYRIGHT: (C)2005,JPO&NCIPI