| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and a device for lamination capable of, when an object is laminated to the other object, shortening a time required for laminating a plurality of objects, and also capable of preventing damage due to the heating of a recognizing means for two upper and lower visual fields, and the generation of voids. <P>SOLUTION: The laminating device comprises, in a chamber whose pressure is adjustable, a first stage for fixing an object to be laminated, and a second stage for fixing the other object to be laminated. It comprises, outside the chamber, the recognizing means for directions of the two visual fields for recognizing alignment marks formed at the object and the other object. The recognizing means for directions of the two visual fields is so constituted that, by sliding the first stage and the second stage in the chamber, the object and the other object are arranged in the recess of the chamber so provided on the facing surfaces as to sandwich the recognizing means. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
