发明名称 Method of producing layered assembly and a layered assembly
摘要 An arrangement and process for producing a circuit arrangement is disclosed. The process includes having a layer arrangement, in which two electrically conductive interconnects running substantially parallel to one another are formed on a substrate. At least one auxiliary structure is formed on the substrate and between the two interconnects, running in a first direction, which first direction includes an angle of between 45 degrees and 90 degrees with a connecting axis of the interconnects, running orthogonally with respect to the two interconnects, the at least one auxiliary structure being produced from a material which allows the at least one auxiliary structure to be selectively removed from a dielectric layer. The dielectric layer is formed between the two interconnects, in such a manner that the at least one auxiliary structure is at least partially covered by the dielectric layer.
申请公布号 US2005196950(A1) 申请公布日期 2005.09.08
申请号 US20050498421 申请日期 2005.01.31
申请人 STEINHOGL WERNER;KREUPL FRANZ;HONLEIN WOLFGANG 发明人 STEINHOGL WERNER;KREUPL FRANZ;HONLEIN WOLFGANG
分类号 H01L21/768;H01L51/30;(IPC1-7):H01L21/476 主分类号 H01L21/768
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