| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor with higher sensitivity and precision by obtaining a stable driving vibration as well as reducing influence of a mechanical coupling. <P>SOLUTION: The angular velocity sensor is capable of detecting at least one angular velocity of one axial direction among three directional axses perpendicular to each other. The sensor is provided with a beam structure body suspended via an elastic beam on a substrate. The beam structure body is composed of a pair of driving frames and detection frames. As for the driving frames, each frame is supported at least by a pair of elastic beams, connected to both the sides of the connection part via a pair of driving beams, and vibrated toward the 1st or 2nd axial direction parallel to the substrate surface. The detection frames are connected by the connection part, arranged point to point symmetry to the 1st and/or 2nd axial direction regarding the center of the connection part, and provided with a pair of detection mass body suspended by a detection beam capable of vibrating toward detecting direction, and vibrates around the 3rd axis perpendicular to the substrate surface by vibration the driving frame. The displacement of the detection mass body to the 3rd axis direction generated by the angular velocity is detected by the detection electrode provided on the substrate. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
