| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a board measuring device and a board measuring method. <P>SOLUTION: The board measuring device comprises a reference value storing section 300, a current measuring section 200, and a characteristic value calculating section 400. The reference value storing section 300 stores the characteristic value of a contact hole formed on a dielectric film on a board and the value of a current flowing through the board when the board is irradiated with electrons, the characteristic value and the current value being stored in a correlated manner. The current measuring section 200 measures the value of a current flowing through a test board 10 when the test board 10 is irradiated with electrons. The characteristic value calculating section 400 calculates the characteristic value of a contact hole of the test board 10, using the current value measured on the test board 10 and the characteristic value and current value stored in the reference value storing section 300. The calculated characteristic value of the contact hole may represents the area of a part of the test board that is exposed by the contact hole or the thickness of a film remaining in the contact hole. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
