APPARATUS PROVIDED WITH AT LEAST ONE BEAM RADIATION SEMICONDUCTOR DEVICE, AND METHOD OF STABILIZING OPERATING TEMPERATURE OF THE BEAM RADIATION SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a beam radiation semiconductor device, capable of easily stabilizing a peak wavelength or an easy method of stabilizing the beam radiation semiconductor device. SOLUTION: At least one electrical heating element 2 for heating a semiconductor device is arranged in a semiconductor device 1. An electrical heating element is arranged in the semiconductor device 1, and when the operating temperature of the semiconductor device is lower than the predetermined target value, the semiconductor device is heated by using the heating element. COPYRIGHT: (C)2005,JPO&NCIPI