| 摘要 |
PROBLEM TO BE SOLVED: To provide an image probe made small in size and light in weight, easily attached/detached and capable of optionally setting an imaging direction. SOLUTION: The image probe has a CCD camera 27 picking up the image of a work and outputting the image data, imaging optical systems 24, 25 and 26 forming the image of the work on the CCD camera 27, a vertical illumination light source 31 constituted of a semiconductor light emitting element generating illuminating light for the vertical illumination of the work, and an illumination optical system 29 joining the illuminating light from the light source 31 into the imaging optical systems and guiding it to the work through the imaging optical systems. The optical parts are attached to a chassis 23. The measuring probe 1 is used at an optional angle as a measuring probe for a three-dimensional measuring machine. COPYRIGHT: (C)2005,JPO&NCIPI
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