| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying and transferring device capable of easily and surely handling a substrate by an inexpensive device constitution. SOLUTION: This substrate conveying and transferring device 1 has a cassette 2 having a plurality of steps of accommodation parts accommodating a substrate 11, a bogie 4 loading and conveying the cassette 2, and a lifter 6 arranged opposite to a substrate processing device for elevating the cassette 2. A frame 4a of the bogie 4 loading the cassette 2 is fitted with a frame 22 of a lifter 6, and a servomotor 30 is rotated to raise an elevation plate 21. Then, the cassette 2 is elevated and moved, so that a desired accommodation part is opposed to an entrance/exit of the substrate of the processing device. COPYRIGHT: (C)2005,JPO&NCIPI
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