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发明名称
Teilchenoptische Anordnung und Verfahren zur teilchenoptischen Erzeugung von Mikrostrukturen
摘要
申请公布号
DE59912355(D1)
申请公布日期
2005.09.08
申请号
DE19995012355
申请日期
1999.11.06
申请人
CARL ZEISS NTS GMBH
发明人
BENNER, DR.
分类号
G03F7/20;H01J37/317;(IPC1-7):H01J37/317
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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