发明名称 DEVICE AND METHOD FOR GENERATING HIGHLY EFFICIENT COHERENT ULTRAVIOLET RAY
摘要 <P>PROBLEM TO BE SOLVED: To provide a coherent ultraviolet ray generating device that converts an infrared-ray laser oscillator output capable of tuning a small-sized coherent UV light source with high efficiency and a solid laser oscillation output of fixed laser wavelength into secondary higher harmonics of two kinds of wavelength in high-efficiency wavelength converting methods by using nonlinear optical crystals and outputting coherent ultraviolet rays of 210 to 260 nm in wavelength with high coversion efficiency through a sum frequency mixing nonlinear optical crystal. <P>SOLUTION: Provided are at least one or more solid laser resonators for excitation, a means of generating coherent beams of two wavelengths by exciting two kinds of solid laser media with laser beam from the laser resonators for excitation, a means of guiding the coherent beams to nonlinear optical crystals matched with their wavelengths and generating secondary higher harmonic coherent beams by the wavelengths, an optical means of coaxially arranging the coherent beams of the secondary higher harmonics, a means of guiding the coaxially arranged coherent beams to the nonlinear crystal for sum frequency mixing, and the high-efficiency coherent ultraviolet-ray generating device which generates a sum frequency beam through the nonlinear optical crystal for sum frequency mixing. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005242257(A) 申请公布日期 2005.09.08
申请号 JP20040055472 申请日期 2004.02.27
申请人 CYBER LASER KK 发明人 SAKUMA JUN
分类号 G02F1/37;H01L21/027;H01S3/10;H01S3/109 主分类号 G02F1/37
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