| 摘要 |
<P>PROBLEM TO BE SOLVED: To vibrate a movable part in a resonant state to improve the detection sensitivity of angular velocity by matching the frequency of a drive signal outputted from an oscillating circuit with the natural frequency of an angular velocity sensor. <P>SOLUTION: A displacement in the vibrating direction of the movable part 28 is detected by displacement detection parts 35 and 35, and this signal is outputted as an addition signal VA to a multiplier circuit 44 by an adding circuit 43. On the basis of the input addition signal VA, the frequency f of the drive signal VD outputted from the oscillating circuit 41 is set by a frequency control circuit 45, whereby the phase difference between the drive signal VD and the addition signal VA (displacement signal) is set to 90°. According to this, the frequency f of the drive signal VD can be feedback controlled, and the movable part 28 can be vibrated in the resonant state to improve the detection sensitivity of angular velocity. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
