| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate transfer machine which can take the same stage structure, without depending on the type of the substrate, which can heat the entire surface of the substrate on the stage in a rail conveyance, and which can convey without grinding the rear surface of the substrate. <P>SOLUTION: The substrate transfer machine 300 includes, when the substrate is conveyed to a predetermined position on a pin 304, a rail 301 moving obliquely in the downward direction along the shape of a cam provided under a stage 302, the stage 302 for mounting a component on the substrate 303, and the pin 304, on which the end of the rail 301 side of the substrate 303 is placed and which moves in the downward direction for placing the substrate 303 on the stage 302. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
