| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing an Mo-based target material where the packing density of raw material powder into a pressurizing vessel is improved to reduce the deformation of a sintered compact, and further, the uneven distribution of its composition is reduced. SOLUTION: In the production method, a green compact obtained by subjecting raw material powder with a mean particle diameter of≤20μm consisting mainly of Mo to compacting is pulverized to produce secondary powder having a mean particle diameter in the range from the mean particle diameter of the raw material to≤30 mm, thereafter, the secondary powder is packed into a pressurizing vessel and is subjected to pressure sintering to obtain a sintered compact. Next, the sintered compact is subjected to hot plastic working and recrystallization heat treatment, so as to be worked into a target material. COPYRIGHT: (C)2005,JPO&NCIPI
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