摘要 |
PROBLEM TO BE SOLVED: To provide a tuning fork type vibrator which is suitable for cost reduction, characteristics improvement and manufacture process simplification. SOLUTION: In a tuning fork type crystal vibrator constituted by extending a pair of tuning fork arms 1 from a tuning fork base and forming electrodes on a tuning fork principal surface and a tuning fork side surface with an X axis of a crystal axis (XYZ) as width, Y axis as length and Z axis as thickness direction, the electrodes on the tuning fork principal surface and the tuning fork side surface are made of different materials. Furthermore, each of side surfaces of the tuning fork is an X plane, and a sensor electrode for detecting an electric charge caused by an angular velocity is provided on at least one of the surfaces. COPYRIGHT: (C)2005,JPO&NCIPI
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