发明名称 |
MASK FOR SETTLING CONDUCTIVE BALL |
摘要 |
PROBLEM TO BE SOLVED: To form conductive bumps for connecting electronic components on electrodes surfaces by settling conductive balls on an electrode surface through a mask, using a squeegee such that one conductive ball surely is dropped into the opening of a mask, and extra conductive balls are scraped off. SOLUTION: The mask for setting conductive balls has a basic pattern composed of all opening groups provided recessively on both surfaces (electrode side and squeegee side) of a layer (first layer) having openings for passing conductive balls, and steps provided projectively on other regions than the basic pattern. The projective portions of the steps are made from a metal plating layer formed by electroplating on the first layer. COPYRIGHT: (C)2005,JPO&NCIPI
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申请公布号 |
JP2005243723(A) |
申请公布日期 |
2005.09.08 |
申请号 |
JP20040048291 |
申请日期 |
2004.02.24 |
申请人 |
IBIDEN CO LTD;PROCESS LAB MICRON:KK |
发明人 |
SUMITA ATSUKI;KIMURA OSAMU;KOIZUMI YASUTAKA;IWASAKI KOTA;CHIBA HIDEKI |
分类号 |
H01L21/60;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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