发明名称 MASK FOR SETTLING CONDUCTIVE BALL
摘要 PROBLEM TO BE SOLVED: To form conductive bumps for connecting electronic components on electrodes surfaces by settling conductive balls on an electrode surface through a mask, using a squeegee such that one conductive ball surely is dropped into the opening of a mask, and extra conductive balls are scraped off. SOLUTION: The mask for setting conductive balls has a basic pattern composed of all opening groups provided recessively on both surfaces (electrode side and squeegee side) of a layer (first layer) having openings for passing conductive balls, and steps provided projectively on other regions than the basic pattern. The projective portions of the steps are made from a metal plating layer formed by electroplating on the first layer. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005243723(A) 申请公布日期 2005.09.08
申请号 JP20040048291 申请日期 2004.02.24
申请人 IBIDEN CO LTD;PROCESS LAB MICRON:KK 发明人 SUMITA ATSUKI;KIMURA OSAMU;KOIZUMI YASUTAKA;IWASAKI KOTA;CHIBA HIDEKI
分类号 H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址