Imprint lithography for superconductor devices

摘要

One aspect of this disclosure relates to a method of building a superconductor device on a substrate, comprising depositing an imprint layer on at least a portion of the subdtrate. The imprint layer is imprinted to provide an imprinted portion of the imprint layer and a non-imprinted portion of the imprint layer. A superonductor layer is deposited on at least a portion of the imprint portion of the imprint layer.