发明名称 Diffractometer
摘要 A monochromator 4 is used to direct X-rays from X-ray source 2 onto a sample 14 as a convergent beam. The sample 14 is in a growth chamber. The sample is rotated, and diffraction measurements are made in parallel with multichannel detector 22 . A specific reflection is used so that the intensity against angle graph measured in the multichannel detector gives information about the vertical lattice parameter. To compensate for wobble inevitably introduced by the rotation of the sample, short time measurements are made and summed.
申请公布号 US2005195941(A1) 申请公布日期 2005.09.08
申请号 US20050065715 申请日期 2005.02.24
申请人 LISCHKA KLAUS;KHARCHENKO ALEXANDER 发明人 LISCHKA KLAUS;KHARCHENKO ALEXANDER
分类号 G01N23/207;C30B25/16;C30B35/00;G01N23/20;H01L21/205;(IPC1-7):G01N23/20 主分类号 G01N23/207
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