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发明名称
VORRICHTUNG ZUR KORREKTUR VON LINSENFEHLERN IN TEILCHEN-OPTISCHER GERÄTE
摘要
申请公布号
DE69733873(D1)
申请公布日期
2005.09.08
申请号
DE19976033873
申请日期
1997.05.07
申请人
FEI CO., HILLSBORO
发明人
KRIJN, PETRUS;HENSTRA, ALEXANDER;VAN DER MAST, DIEDERICK
分类号
H01J37/153;(IPC1-7):H01J37/153
主分类号
H01J37/153
代理机构
代理人
主权项
地址
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