| 摘要 |
PROBLEM TO BE SOLVED: To provide a stacked ceramic substrate which is suppressed for expansion in an end face direction and has no steps on the surface, and to provide its manufacturing method. SOLUTION: The method of manufacturing the stacked ceramic substrate comprises a green sheet laminate forming process, wherein a green sheet laminate 102 is formed, and a burning process wherein the green sheet laminate is burned. In the green sheet laminate forming process, a sheet-like frame 6 whose outer shape is nearly the same as that of the green sheet 1 and which has an opening formed in an inner part, in such a shape as to surround electronic circuit elements, etc. 2 and 3 is formed of a material which can be sintered together with the green sheet. The green sheet laminate forming process includes a process, wherein such a frame is laid upon the most upper surface and/or the most lower surface of the stacked green sheets, so that the edges of the frames and the green sheets are trued up and then the frames and the green sheets are pressurized together. COPYRIGHT: (C)2005,JPO&NCIPI |
