摘要 |
<P>PROBLEM TO BE SOLVED: To provide a green sheet capable of reconciling photosensitive properties such as resolution and developability with green sheet properties such as sheet forming property and tackiness. <P>SOLUTION: The composite sheet is formed with an adhesive green sheet having adhesion to a substrate and a photosensitive green sheet having photosensitivity stacked on the adhesive green sheet. The adhesive green sheet may consist of an inorganic component (b) such as glass powder and a binder resin. The photosensitive green sheet may consist of an inorganic component (a) such as glass powder and a water- or alkali-developable photosensitive resin. The photosensitive resin may consist of a negative photosensitive resin composition consisting of a base polymer (such as a hydroxyalkylcellulose having a photopolymerizable group) and a photopolymerization initiator. Such a composite sheet can highly reconcile photosensitive properties with green sheet properties because a sheet having photosensitivity and a sheet having adhesion to a substrate are individually formed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |