发明名称 |
METHOD FOR CREATING CAM DATA FOR ELECTRONIC CIRCUIT BOARD, CAD/CAM SYSTEM FOR ELECTRONIC CIRCUIT BOARD, AND METHOD FOR PRODUCING ELECTRONIC CIRCUIT BOARD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for creating CAM data for an electronic circuit board by which CAD data which reflect the opening shape of a recognition mark for alignment in a solder resist layer can be appropriately and efficiently converted to CAM data of an exposure mask for photolithography for forming the openings. <P>SOLUTION: In order to form openings of a recognition mark for alignment of a substrate in a solder resist layer by a photolithography process using a photosensitive resin, the mask pattern of the recognition mark in a mask pattern for the openings is corrected so that the opening shape of the recognition mark reflected in CAD data has two segments which intersect each other in a concave shape on the opening side and that an etching margin for the segments becomes larger with the intersection of the segments as a correction reference point, as it becomes more distant from the correction reference point , and conversion as CAM data is performed. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
申请公布号 |
JP2005241885(A) |
申请公布日期 |
2005.09.08 |
申请号 |
JP20040050460 |
申请日期 |
2004.02.25 |
申请人 |
NGK SPARK PLUG CO LTD |
发明人 |
ONO TOMOSHIGE;YOKOI KENJI;OHASHI HATSUO |
分类号 |
C23F1/00;G03F1/68;G03F1/70;G06F17/50;H01L23/12;H05K3/00;(IPC1-7):G03F1/08 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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