发明名称 OPTICAL WAVELENGTH PLATE AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To obtain an optical wavelength plate of fine cyclic structure having a desired phase difference. SOLUTION: A dielectric substrate 1 having a refractive index n<SB>1</SB>is coated with an amorphous dielectric medium 2 having a refractive index n<SB>2</SB>larger than the refractive index n<SB>1</SB>, and a rectangular grating 3 is formed on the amorphous dielectric medium 2 by etching. When microcrystal is formed on the amorphous dielectric medium 2 by heat treatment to increase the refractive index n<SB>2</SB>, the magnitudeΔn of structural double refraction becomes large, so that the phase differenceΔΦof a rugged grating pattern by the rectangular grating 3 becomes large without increasing the groove depth D of the rectangular grating 3. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005242083(A) 申请公布日期 2005.09.08
申请号 JP20040053252 申请日期 2004.02.27
申请人 CANON INC 发明人 ISANO TASUKE
分类号 C03B32/02;G02B5/18;G02B5/30;(IPC1-7):G02B5/30 主分类号 C03B32/02
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