| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pellicle made of synthetic quartz glass which can be efficiently cleaned with a cleaning liquid. <P>SOLUTION: The pellicle 1 made of synthetic quartz glass is composed of a rectangular pellicle frame 2 and a pellicle sheet 3 stuck to cover one face of the frame 2 while the other face kept open. The pellicle has a groove 4 which connects the inside and the outside of the pellicle frame 2 by notching the corner portion of the pellicle frame on the sticking face between the pellicle frame 2 and the pellicle sheet 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
