| 摘要 |
PROBLEM TO BE SOLVED: To reduce a space exclusively used for a temperature measuring device mounted in the heat treatment furnace, to secure a wide space for a treated object placed in a heat treatment furnace and to measure a temperature of the treated object placed in the heat treatment furnace on a real time basis. SOLUTION: This multiple-chamber heat treatment device comprising at least a heating chamber 3 for heating the heated object X, and a cooling chamber 2 for cooling the treated object X heated in the heating chamber 3, further comprises a sensor part 31 fixed to a specific part of a tray for conveying the treated object X, a measuring part 32 electrically connected to the sensor part 31 and mounted at the external, a connection wire 30 connected to the sensor part 31 at its one end, and connected to the measuring part 32 at the other end part for electrically connecting the sensor part 31 and the measuring part 32, and a reel part 40 mounted in the cooling chamber for taking up the connection wire 30. COPYRIGHT: (C)2005,JPO&NCIPI
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