Method for measuring localized crystal lattice spacing by measuring the density of back-scattered electrons at two different resolutions, one for detecting a measurement area and the second for measuring the lattice spacing

摘要

Method for determining the local lattice spacing in a crystal by measuring the density of back-scattered electrons within the areas of diffraction bands, which have been generated as a result of the irradiation of a crystal lattice with electrons. Measurements are made at two different resolutions. The first resolution is only high enough to permit detection of a given measurement area, while the second resolution is sufficient to determine the localized crystall lattice spacing.