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摘要
申请公布号
JP3692844(B2)
申请公布日期
2005.09.07
申请号
JP19990203632
申请日期
1999.07.16
申请人
发明人
分类号
C09K11/06;H01L27/32;H01L51/50;H01L51/52;H05B33/10;H05B33/12;H05B33/14;H05B33/22;(IPC1-7):H05B33/22
主分类号
C09K11/06
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代理人
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