发明名称 Reaction Apparatus
摘要 A reaction apparatus including: a main body having a reaction chamber with an upper opening thereof, a lid hinge, and a lid combined to the lid hinge, rotationally opening and closing the upper opening; a lifting member having a first end part separated from a rotation axis of the lid and rotatably combined with the lid, and a second end part rotatably combined to the main body, that moves in opening and closing directions; and a driver activating the lifting member. With this configuration, the present invention provides a reaction apparatus, with a lid that is opened and closed readily, and in which the lid parallelly contacts a sealing member, and thereby creating a vacuum in the reaction chamber with ease.
申请公布号 KR100512740(B1) 申请公布日期 2005.09.07
申请号 KR20030039822 申请日期 2003.06.19
申请人 发明人
分类号 H01L21/02;B01J3/03;H01L21/00;(IPC1-7):H01L21/02 主分类号 H01L21/02
代理机构 代理人
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