| 摘要 |
A heat treatment system comprising a reaction container having three zones divided vertically, a substrate holder, and heaters and control sections provided for respective zones on the side of the reaction container. Each control section is connected with a section for detecting the temperature of a zone being served. The temperature detecting section of a middle stage zone is also connected with control sections corresponding to the upper stage zone and the lower stage zone. Control sections of the upper stage zone and the lower stage zone operate a temperature detection value at the temperature detecting section of the middle stage zone as a temperature target value based on a temperature detection value of that zone at the time of carrying in the substrate holder and outputs a heater control signal.
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