| 发明名称 |
FAST LOCALIZATION OF ELECTRICAL FAILURES ON AN INTEGRATED CIRCUIT SYSTEM AND METHOD |
| 摘要 |
Fast localization of electrically measured defects of integrated circuits includes providing information for fabricating a test chip having test structures configured for parallel electrical testing. The test structures on the test chip are electrically tested employing a parallel electrical tester. The results of the electrical testing are analyzed to localize defects on the test chip. |
| 申请公布号 |
EP1570510(A2) |
申请公布日期 |
2005.09.07 |
| 申请号 |
EP20030813000 |
申请日期 |
2003.12.11 |
| 申请人 |
PDF SOLUTIONS, INC. |
发明人 |
CIPLICKAS, DENNIS;HESS, CHRISTOPHER;LEE, SHERRY;WEILAND, LARG, H. |
| 分类号 |
G01R1/04;G01R19/00;G01R31/26;G01R31/28;G01R31/307;H01L;H01L21/20;H01L21/44;H01L21/66;H01L23/544;(IPC1-7):H01L21/20 |
主分类号 |
G01R1/04 |
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