METHOD FOR ADJUSTING AN OPTICAL IMAGING PROPERTY OF A PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS,申请号EP20030717185-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD FOR ADJUSTING AN OPTICAL IMAGING PROPERTY OF A PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
摘要
申请公布号	EP1570315(A2)	申请公布日期	2005.09.07
申请号	EP20030717185	申请日期	2003.02.17
申请人	CARL ZEISS SMT AG	发明人	GRAEUPNER, PAUL
分类号	G03F7/20;(IPC1-7):G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Combination table and desk

Generic special service mailing assembly and a method for using same

Rotary centering compensator for vehicle steering systems

Device for squeezing a viscous liquid from a tube dispenser

Filter dispenser

Foldable container having display portion acting as source indicia

Wheel and brake assembly

Fire extinquishing system for a christmas tree

Directional coupling sensor for ensuring complete perforation of a wellbore casing

Mobile multi-function rig

Portable automated water purifier and method

Portable electrical wrapping apparatus

Combination shut off valve and excessive flow valve

Rocker valve for sealing large orifices

Method of hanging a clay flowerpot

Multiple item adjustable clothes hanger

Continuous casting method and relative device

Flower like rosette cutting device

Dosage indicator