| 摘要 |
<p>In an electric contact probe unit using a perforated plate member as a holder member, the holder member is made of material having a low coefficient of thermal expansion so that, even when used in a high temperature environment, the thermal expansion of the holder member can be minimized so that the positional accuracy of the electric contact probe units can be ensured without creating cumulative errors between those located remote from each other. When the holder member consists of a plurality of laminated thin plate members, because the perforation of thin plate members can be accomplished by etching, the production process is suited for mass production. By forming electrically insulating film on the inner circumferential surface of the holder hole, it becomes possible to form the holder member from materials which have a low coefficient of thermal expansion but are electroconductive, thereby expanding the range of material selection. <IMAGE></p> |
