发明名称 |
Method for using an in line coating apparatus |
摘要 |
<p>An inward transfer chamber (2), buffer chambers (21) and an outward transfer chamber are developed as identical modules and can receive substrates (55) up to a specified maximum size. For coating substrates greater than the modules, gates (61,64) between the corresponding chambers are opened such that pressure conditions of the buffer chambers are adapted to one another.</p> |
申请公布号 |
EP1571234(A2) |
申请公布日期 |
2005.09.07 |
申请号 |
EP20040024454 |
申请日期 |
2004.10.14 |
申请人 |
APPLIED MATERIALS GMBH & CO. KG |
发明人 |
RICHERT, HOLGER;WEIMANN, MANFRED |
分类号 |
B65G49/00;B05C15/00;B65G49/06;C23C14/56;C23C16/455;H01L21/677;(IPC1-7):C23C14/56 |
主分类号 |
B65G49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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