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发明名称
Method of producing a trench capacitor with insulation collar
摘要
申请公布号
EP0987754(A3)
申请公布日期
2005.09.07
申请号
EP19990117722
申请日期
1999.09.08
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHREMS, MARTIN, DR.;ARNOLD, NORBERT
分类号
H01L21/316;H01L21/8242;(IPC1-7):H01L21/824
主分类号
H01L21/316
代理机构
代理人
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