| 摘要 |
<p>A laser beam machine according to the invention comprises a scanning lens for gathering laser light deflected by a deflection mirror on a workpiece for applying the laser light to a plurality of parts in a deflection area using the above-mentioned deflection mirror and the above-mentioned scanning lens and machining the workpiece. The laser beam machine comprises energy measurement means for measuring energy of the laser light applied to a plurality of different positions in the above-mentioned deflection area, so that the energy of the laser light applied to a plurality of different positions in the deflection area can be measured, occurrence of partial energy lowering depending on the laser light application position, caused by dirt of the scanning lens can be known, and appropriate maintenance is executed based on the information, whereby it is made possible to perform stable machining over a long term without causing a machining failure to occur.</p> |
