发明名称 Method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer
摘要 A method for obtaining reversible resistance switches on a PCMO thin film when integrated with a highly crystallized seed layer includes depositing, by MOCVD, a seed layer of PCMO, in highly crystalline form, thin film, having a thickness of between about 50 Å to 300 Å, depositing a second PCMO thin film layer on the seed layer, by spin coating, having a thickness of between about 500 Å to 3000 Å, to form a combined PCMO layer; increasing the resistance of the combined PCMO film in a semiconductor device by applying a negative electric pulse of between about -4V to -5V, having a pulse width of between about 75 nsec to 1 musec; and decreasing the resistance of the combined PCMO layer in a semiconductor device by applying a positive electric pulse of between about +2.5V to +4V, having a pulse width greater than 2.0 musec.
申请公布号 US6939724(B2) 申请公布日期 2005.09.06
申请号 US20030640770 申请日期 2003.08.13
申请人 SHARP LABORATORIES OF AMERICA, INC. 发明人 ZHUANG WEI-WEI;LI TINGKAI;EVANS DAVID R.;HSU SHENG TENG;PAN WEI
分类号 H01L27/04;H01L21/20;H01L21/822;H01L45/00;(IPC1-7):H01L21/00 主分类号 H01L27/04
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