Thin-film inspection method and device

摘要

Disclosed is a thin-film inspection device with two or more light sources. This device can control the wavelength and intensity of light and illuminate the lights with different incident angles, and are used to control the interference intensity, thereby determining optimal inspection conditions to obtain a reliable inspection result even when different kinds of thin films coexist. The thin films are formed on a flat plate and have different indices of refraction and thicknesses. An incident light control unit is disposed between the illumination unit and the flat plate for controlling the light to be incident on the patterns. A sensor unit detects a reflection light from the patterns. A reflection light control unit is disposed between the flat plate and the sensor unit and controls the light to be detected by the sensor unit. A control unit controls the movement of the illumination unit and the sensor unit.