发明名称 VERY LOW MOISTURE O-RING AND METHOD FOR PREPARING THE SAME
摘要 Very low moisture o-rings are prepared by placing standard o-rings (16) under vacuum in an inert atmosphere for a period of time (18) sufficient to achieve a desired outgassing rate. Heat is not applied. While the o-rings are under vacuum, moisture is removed from the o-rings (20) via diffusion transport.
申请公布号 KR20050088461(A) 申请公布日期 2005.09.06
申请号 KR20057011658 申请日期 2005.06.20
申请人 ATMEL CORPORATION 发明人 ENICKS DARWIN G.
分类号 C23C16/44;H01L21/00;(IPC1-7):H01L21/205 主分类号 C23C16/44
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