摘要 |
A protection element for improving the spherical segmentation performance when a low-melting-point metal element is heated and fused, comprising a heating element and the low-melting- point metal element that are formed on a substrate, the low-melting-point metal element being fused by heating of the heating element. The protection element has a region where the low-melting-point metal element floats from a base (e.g. an insulation layer), and when the sectional area of the low-melting-point metal element (4) at a pair of low-melting- point metal element-use electrodes (3a and 3b, 3b and 3c) sandwiching the region is S (mum2) and the floating height of the floating region is H (mum), the relational expression H/S >= 5x10- 5 is satisfied. In addition, the both top surfaces of the pair of the low-melting-point metal element-use electrodes preferably protrude beyond the top surface of the base, or the insulation layer. Or, a step difference is preferably provided between the top surfaces of the pair of the low-melting-point metal element-use electrodes to allow the low- melting-point metal element to incline between the pair of the low- melting-point metal element-use electrodes.
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