摘要 |
Disclosed is a symmetric vertical Hall element comprising a trough (2) which has a first type of conductivity, is embedded in a substrate (3) having a second type of conductivity, and is in contact with four contacts (4, 5, 6, 7) that are used as power contacts and voltage contacts. From an electrical viewpoint, such a Hall element comprising four contacts can be considered as a resistance bridge which is formed by four resistors (R1to R4) of the Hall element. Said Hall element is considered as ideal from an electrical perspective when the four resistors (R1 to R4) have the same value. The invention relates to a series of measures for electrically balancing the resistance bridge. A first measure consists of providing at least one additional resistor while a second measure consists of locally increasing or reducing the electrical conductivity of the trough. A third measure consists of providing two Hall elements which are electrically connected in parallel such that the Hall voltages thereof are applied in the same direction and the offset voltages thereof largely compensate each other.
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