| 摘要 |
A scanning-type maskless exposure apparatus having, as a variable forming mask, a two-dimensional light modulation device capable of moving a formed modulated light distribution in one direction at a high speed. A two-dimensional light modulation device (VM1) is used as a variable forming mask of a scanning-type maskless exposure apparatus. The light modulation device (VM1) has a light modulation element array (11) where light modulation elements each composed of a signal holding element and a light modulation element are two dimensionally arranged and has a control circuit mechanism (12) capable of sequentially sending a light modulation signal, held by a signal holding element, in one direction to an adjacent signal holding element. A light modulation state distribution, as a pattern on the variable forming mask, capable of being sent in one direction is transferred, through a projection optical system (13), on a moving substrate (W) to be exposed. |
