发明名称 Optical image measuring apparatus
摘要 To provide an optical image measuring apparatus capable of calculating an intensity of a direct current component composed of background light based on a result obtained by detection of interference light and obtaining a signal intensity of the interference light using the calculated intensity. The apparatus includes: an optical interference system to divide a light beam into signal light and reference light, and the signal light propagating through an object to be measured and the reference light are superimposed to produce interference light; beam splitters for dividing it into three interference light beams; shutters to perform sampling; photo detectors for detecting the sampled interference light beams and converting them into electrical signals; and a signal processing portion for calculating the signal intensity of the interference light and the spatial phase distribution thereof based on the electrical signals.
申请公布号 US2005190374(A1) 申请公布日期 2005.09.01
申请号 US20050062592 申请日期 2005.02.23
申请人 KABUSHIKI KAISHA TOPCON 发明人 CHAN KINPUI;AKIBA MASAHIRO;FUKUMA YASUFUMI;OTSUKA HIROYUKI;TSUKADA HISASHI
分类号 G01B9/02;G01B11/24;G01J9/02;G01N21/17;(IPC1-7):G01B9/02 主分类号 G01B9/02
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