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发明名称
Optische Anordnung und Projektionsbelichtungsanlage der Mikrolithographie mit passiver thermischer Kompensation
摘要
申请公布号
DE59912313(D1)
申请公布日期
2005.09.01
申请号
DE19995012313
申请日期
1999.01.19
申请人
CARL ZEISS SMT AG
发明人
WAGNER, CHRISTIAN DR.;TRUNZ, MICHAEL;HILGERS, RALF
分类号
G02B7/00;G03F7/20;(IPC1-7):G02B7/00
主分类号
G02B7/00
代理机构
代理人
主权项
地址
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