发明名称 |
Objective with at least one optical element |
摘要 |
An objective ( 2 ) with at least one optical element ( 4 ), which is mounted in an inner ring ( 3 ). The inner ring ( 3 ) is connected to an outer mount ( 1 ). A manipulator ( 10 ) is provided for displacing the optical element ( 4 ) in at least a direction perpendicular to an optical axis. The inner ring ( 3 ) is connected to the outer mount ( 1 ) by means of at least two adjusting joints ( 5 ) with manipulators ( 10 ) and at least one swivel joint ( 6 ). The at least two adjusting joints ( 5 ) and the at least one swivel joint ( 6 ) are provided with joint arms ( 8 ) extending at least approximately in a tangential direction with respect to the inner ring ( 3 ), by means of which arms the inner ring ( 3 ) is elastically connected to the outer mount ( 1 ). The ends of the joint arms ( 8 ) are articulated on the inner ring ( 3 ) in such a way that temperature-induced changes in length of the joint arms ( 8 ) are converted into a uniform turning direction of the inner ring ( 3 ) with respect to the outer mount ( 1 ) about the center of the optical element.
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申请公布号 |
US2005190462(A1) |
申请公布日期 |
2005.09.01 |
申请号 |
US20050063113 |
申请日期 |
2005.02.22 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
RAU JOHANNES;SCHOEPPACH ARMIN;WEBER ULRICH |
分类号 |
G02B7/02;(IPC1-7):G02B7/02 |
主分类号 |
G02B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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