HOUSING STRUCTURE FOR MOUNTING OPTICAL ELEMENTS,申请号WO2005EP01826-传众专利搜索

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发明名称	HOUSING STRUCTURE FOR MOUNTING OPTICAL ELEMENTS
摘要
申请公布号	WO2005081029(A2)	申请公布日期	2005.09.01
申请号	WO2005EP01826	申请日期	2005.02.22
申请人	CARL ZEISS SMT AG;ASML NETHERLANDS B.V.;KWAN, YIM-BUN, PATRICK;GEUPPERT, BERNHARD;KEMPER, NICO	发明人	KWAN, YIM-BUN, PATRICK;GEUPPERT, BERNHARD;KEMPER, NICO
分类号	G02B7/02;G03F7/20;(IPC1-7):G02B7/02	主分类号	G02B7/02
代理机构		代理人
主权项
地址

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