Polishing cloth refining method, involves rubbing off surface of cloth with tool, compiling refining conditions of cloth using parameters, monitoring conditions and terminating refining of cloth when specified condition is achieved

摘要

The method involves rubbing off a surface of a polishing cloth (1) with a conditioning tool (6) so that friction forces arise between the surface and tool. Refining conditions of the cloth are compiled using parameters such as quality of rinsing liquid, force, thickness and physical properties of the cloth. The conditions are monitored, and the refining of the cloth is terminated when a specified condition is achieved.