发明名称 |
Barriereschicht für siliziumhaltiges Substrat |
摘要 |
<p>A barrier layer for a silicon containing substrate which inhibits the formation of gaseous species of silicon when exposed to a high temperature aqueous environment comprises an aluminosilicate of Group IIA and/or Group IIIB and a Group VB oxide. In one preferred embodiment, the barrier layer comprises 25 to 75 wt.% of the Group VB oxide (Ta, Nb and mixtures thereof) with the balance being barium-strontium aluminosilicate.</p> |
申请公布号 |
DE60205204(D1) |
申请公布日期 |
2005.09.01 |
申请号 |
DE2002605204 |
申请日期 |
2002.12.17 |
申请人 |
UNITED TECHNOLOGIES CORP. (N.D.GES.D. STAATES DELAWARE), HARTFORD |
发明人 |
HOLOWCZAK, JOHN E.;EATON, HARRY E. |
分类号 |
C04B41/85;B32B18/00;C04B41/50;C04B41/52;C04B41/87;C04B41/89;C23C4/10;C23C26/00;C23C28/00;C23C28/04;C23C30/00;F01D5/28;(IPC1-7):C04B41/87 |
主分类号 |
C04B41/85 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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