发明名称 Barriereschicht für siliziumhaltiges Substrat
摘要 <p>A barrier layer for a silicon containing substrate which inhibits the formation of gaseous species of silicon when exposed to a high temperature aqueous environment comprises an aluminosilicate of Group IIA and/or Group IIIB and a Group VB oxide. In one preferred embodiment, the barrier layer comprises 25 to 75 wt.% of the Group VB oxide (Ta, Nb and mixtures thereof) with the balance being barium-strontium aluminosilicate.</p>
申请公布号 DE60205204(D1) 申请公布日期 2005.09.01
申请号 DE2002605204 申请日期 2002.12.17
申请人 UNITED TECHNOLOGIES CORP. (N.D.GES.D. STAATES DELAWARE), HARTFORD 发明人 HOLOWCZAK, JOHN E.;EATON, HARRY E.
分类号 C04B41/85;B32B18/00;C04B41/50;C04B41/52;C04B41/87;C04B41/89;C23C4/10;C23C26/00;C23C28/00;C23C28/04;C23C30/00;F01D5/28;(IPC1-7):C04B41/87 主分类号 C04B41/85
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