发明名称 Integrated circuit with enhancement mode pseudomorphic high electron mobility transistors having on-chip electrostatic discharge protection
摘要 An integrated circuit (IC) with high electron mobility transistors, such as enhancement mode pseudomorphic high electron mobility transistors (E-pHEMTs) and method for fabricating the IC utilizes an increased gate-to-drain etch recess spacing in some of the high electron mobility transistors to provide on-chip electrostatic discharge protection. The use of the increased gate-to-drain etch recess spacing allows smaller high electron mobility transistors to be used for ancillary low speed applications on the IC, which reduces the chip area occupied by these ancillary transistors.
申请公布号 US2005189560(A1) 申请公布日期 2005.09.01
申请号 US20040789301 申请日期 2004.02.26
申请人 PARK CHUL H. 发明人 PARK CHUL H.
分类号 H01L27/04;H01L21/335;H01L21/338;H01L21/822;H01L27/02;H01L27/095;H01L29/08;H01L29/778;H01L29/812;H01L31/0328;(IPC1-7):H01L31/032 主分类号 H01L27/04
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