| 发明名称 |
Capacitor, semiconductor device, and method of manufacturing the semiconductor device |
| 摘要 |
A capacitor includes a pair of electrodes and a ferroelectric film sandwiched between the electrodes. The electrodes are provided perpendicular to the direction of the polarization axis of the ferroelectric film.
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| 申请公布号 |
US2005190589(A1) |
申请公布日期 |
2005.09.01 |
| 申请号 |
US20050121054 |
申请日期 |
2005.05.04 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
MARUYAMA KENJI |
| 分类号 |
H01L27/105;H01L21/02;H01L21/768;H01L21/8246;H01L27/115;(IPC1-7):G11C11/22 |
主分类号 |
H01L27/105 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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